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BS78Laserscale

BS78 Laserscale
  • Features
  • Specifications
  • Dimensions
  • Manual
  • Catalog

Features

High-speed and high-resolution, while maintaining stable, ultraprecision measuring. Ideal for precision stages, semiconductor inspection/manufacturing systems, and ultraprecision processing machines.

  • High-resolution scale with signal pitch of approx. 138nm, outperforming light wave interferometer systems
  • High stability, unaffected by humidity, air pressure and air disturbances
  • Reference point accuracy : ±0.1μm
  • Scale accuracy : ±0.04μm (measuring length : 40 mm)
  • Non-contact design eliminates return error.
  • Special non-magnetic and vacuum-compatible models available
  • Using low expansion glass : -0.7 x 10-6/℃ (measuring length : 10 to 420 mm)

Specifications

Specifications

Magnescale reserves the right to change product specifications without prior notice.

ModelBS78
Measuring length10(only N/NS)/40/70/120/170/220/270/320/370/420
Overall length58mm (L=10mm:open type scale), L + 26mm (L= 40mm to 420mm)
L: Measuring length
Max. travelL + 2mm (L=10mm:open type scale), L +10mm (L= 40mm to 420mm)
L: Measuring length
Scale accuracy(at 20˚C)
  • NS type, RS type :
  • ±0.03μm (L=10mm : NS type)
  • ±0.04μm (L=40mm)
  • ±0.10μm (L=70/120mm)
  • ±0.18μm (L=170/220mm)
  • ±0.25μm (L=270mm)
  • ±0.34μm (L=320mm)
  • ±0.39μm (L=370mm)
  • ±0.44μm (L=420mm)
  • L: Measuring length
  • N type, R type :
  • ±0.06μm (L=10mm : N type)
  • ±0.08μm (L=40mm)
  • ±0.20μm (L=70/120mm)
  • ±0.35μm (L=170/220mm)
  • ±0.50μm (L=270/370mm)
  • ±0.65μm (L=420mm)
  • L: Measuring length
Grating pitch Approx. 0.55μm
Signal pitch Approx. 0.138μm (Approx. 138nm)
Reference point accuracy 0.1μm (Only R/RS type)
Reference point positionAt the center, and every 50mm from the center to the left and
to the right (BS78 models with measuring lengths of 320, 370, 420mm:
20mm offset from the center at 50mm intervals)
Reference point detection directionSingle direction
Return errorThis is virtually eliminated. It should be considered to be
less than two resolution limits of the detector that is used.
RepeatabilityThis is virtually eliminated. It should be considered to be
less than one resolution limit of the detector that is used.
Thermal expansion coefficient-0.7×10-6/℃
Light sourceSemiconductor laser : Wavelength 790nm, Output 6mW
Radiation powerDHHS class 1
Detection principleDiffraction grating scanning system
Operating temperature 10 to 30˚C (No condensation)
Storage temperature-10 to 50˚C (Humidity 60% or less)
Max. response speed400mm/s (When connected with BD96)

Dimensions

Product nameCommonJapaneseEnglish
BS78N Download Download
BS78NS Download Download
BS78R Download Download
BS78RS Download Download

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Manual

Product nameJapaneseEnglishDeutschSimplified ChineseTraditional Chinese
BS78 Download Download Download

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Catalog

BS78 SeriesJapaneseBS78 Catalog Japanese PDF
BS78 SeriesEnglishBS78 Catalog English PDF

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