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BH25Laserscale

BH25 Laserscale
  • Features
  • Specifications
  • Dimensions
  • Manual
  • Catalog

Features

High-accuracy, reflective Laserscale with signal pitch of 250nm Ideal for low-profile stages, semiconductor back-end processing equipment and precision microscopes

  • Signal pitch : 250nm
  • High accuracy : ±1μm/420mm
  • High response speed : 700mm/s
  • Minimum resolution : 0.03125nm
  • Available : with/without reference point
  • Completely non-contact design : Return error is theoretically eliminated.
  • Scale : Soda-lime glass/Low expansion glass
  • Thin head with thickness of 12mm
  • Supporting various resolutions and output modes (Depending on the interpolator connected.)
  • Special vacuum-compatible models available

Specifications

Specifications

Magnescale reserves the right to change product specifications without prior notice.

ModelBH25-REDBH25-NED
Measuring length30/70/120/170/220/270/320/370/420 mm (Low expansion glass/Soda-lime glass)
Overall lengthMeasuring length +26mm
Max. travelMeasuring length +10mm
Scale accuracy(at 20℃)±0.5μm (30 to 170mm) ±1.0μm (220 to 420mm)
Grating pitch1.0μm
Signal pitch0.25μm (250nm)
Reference pointWith reference pointNone
Reference point detection directionSingle directionNone
Output signalInterpolator BD96
ResolutionBD96 connection(Depend on the number of divisions )
Thermal expansion coefficient-0.7×10-6/℃(Low expansion glass) 8 x 10-6/℃ (Soda-lime glass)
Light sourceSemiconductor laser : Wavelength 790nm, Output 6mW
Detection principleDiffraction grating scanning system
Operating temperature10 to 30˚C (No condensation)
Storage temperature -10 to 50˚C (Humidity less than 60%)
Max. response speed700mm/s (When connected with BD96)

Dimensions

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Manual

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Catalog

BH25 SeriesJapaneseBH25 Catalog Japanese PDF
BH25 SeriesEnglishBH25 Catalog English PDF

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