


High-resolution scale with signal wavelength of 138 nm (better than an electro-optic interferometer) boasting fast and reliable measurement performance. Ideally suited for precision stages, semiconductor inspection/manufacturing systems, and ultra-precision processing machines.

Compact, reflective rotary Laserscale featuring high accuracy, high resolution and high response speed. Ideal for high-resolution angle measuring in HDD manufacturing equipment, precision measuring instruments, and aspheric surface processing machines.

Highest resolution of 17 pm when combined with the BS series. Supporting various serial and binary.


High rigidity absolute magnetic scale combining durability with improved accuracy and faster response time.

Extra-durable high-precision absolute rotary Magnescale suitable for all applications involving rotary stage positioning.

Easy-fit non-contact detection and a long measuring range up to 30 m.


The DK series are slim and compact digital gauges that provide high resolution (0.1 μm) and accuracy (1 μm) linear measurements for a variety of applications.

Digital readout to 0.1 ?m scale designed for high-resolution compact DK series digital gauges.

Network measurement system for high-speed communication, multi-axis measurements, and data management.